发明名称 MOUNTING STRUCTURE OF POWER SUPPLY TERMINAL FOR CERAMIC HEATER USED FOR SEMICONDUCTOR INDUSTRY
摘要 <p>PROBLEM TO BE SOLVED: To provide a mounting structure of a power supply terminal to the base board which is suitable for keeping a stable operation of the ceramic heater for long time. SOLUTION: For the mounting structure of power supply terminal for ceramic heater, the ceramic heater is electrically connected to a heating element 2 by screwing and fixing a power supply bolt 5 to a land part 2a of a power supply end part of the heating element 2 formed on a base board.</p>
申请公布号 JP2002203661(A) 申请公布日期 2002.07.19
申请号 JP20000400416 申请日期 2000.12.28
申请人 IBIDEN CO LTD 发明人 SHU ENREI
分类号 H05B3/02;H01L21/68;H01L21/683;(IPC1-7):H05B3/02 主分类号 H05B3/02
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