发明名称 PROBE UNIT AND SUBSTRATE INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To easily exchange probes while reducing manufacturing costs.SOLUTION: A probe unit includes: a distal end side support body for supporting a base end part 23 of a probe 11; and a base end part side support part 32 supporting a base end part side of the probe. The base end part side support part 32 is provided with a posture change mechanism which is equipped with support plates 43, 44 supporting the base end part 23 of the probe 11 inserted in support holes 53, 54, can maintain a first posture in which central axes 53a, 54a of the support holes 53, 54 are displaced just for a first displacement amount, and changes the support plates 43, 44 to a second posture where an amount of displacement of the central axes 53a, 54a when the first posture is cancelled is smaller than the first amount of displacement. The posture change mechanism is provided with: a recessed part 64a having a conical inner surface S formed in the support plate 44; and a plunger 34 which is supported by the support plate 43, presses the inner surface S in a depth direction of the recessed part 64a, and moves the support plate 44 in the direction in which amounts of displacement of the central axes 53a, 54a become small.
申请公布号 JP2014238270(A) 申请公布日期 2014.12.18
申请号 JP20130119401 申请日期 2013.06.06
申请人 HIOKI EE CORP 发明人 KOBAYASHI MASASHI
分类号 G01R1/06;H05K3/00 主分类号 G01R1/06
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