发明名称 |
Coating fluid for boron diffusion |
摘要 |
<p>A coating fluid comprising a boron compound, an organic binder, a silicon compound, an alumina precursor, and water and/or an organic solvent is used to diffuse boron into a silicon substrate to form a p-type diffusion layer. The coating fluid is spin coated onto the substrate to form a uniform coating having a sufficient amount of impurity whereupon a p-type diffusion layer having in-plane uniformity is formed.</p> |
申请公布号 |
EP2578721(A3) |
申请公布日期 |
2014.11.26 |
申请号 |
EP20120187177 |
申请日期 |
2012.10.04 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
TSUKIGATA, SHINTAROU;MATSUOKA, TOSHIFUMI;WATABE, TAKENORI;OTSUKA, HIROYUKI |
分类号 |
C23C10/00;C23C10/18;C23C10/20;C23C10/60;C23C28/00;C23C28/04;H01L21/22;H01L31/068;H01L31/18 |
主分类号 |
C23C10/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|