| 摘要 |
A semiconductor device disclosed in the present description includes a first conductivity type drift layer formed in a semiconductor substrate, and a second conductivity type body layer formed at an upper surface of the semiconductor substrate and located on an upper surface side of the drift layer. The drift layer includes a lifetime control region having a crystal defect density that is equal to or higher than h/2, where h is a maximum value of a crystal defect density of the drift layer that varies in a depth direction of the semiconductor substrate. The lifetime control region is formed by irradiating charged particles to a first conductivity type pre-drift layer including a first resistance layer and a second resistance layer, a resistivity of the second resistance layer being lower than a resistivity of the first resistance layer. At least of a part of the lifetime control region is formed in a range of the second resistance layer. |
