发明名称 Scanned probe microscopy (SPM) probe having angled tip
摘要 A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
申请公布号 US8893310(B2) 申请公布日期 2014.11.18
申请号 US201213539778 申请日期 2012.07.02
申请人 International Business Machines Corporation;Cornell University 发明人 Reuter Mark C.;Bryce Brian A.;Ilic Bojan R.;Tiwari Sandip
分类号 G01Q70/12;G01Q70/10;B82Y15/00 主分类号 G01Q70/12
代理机构 Cantor Colburn LLP 代理人 Cantor Colburn LLP ;Alexanian Vazken
主权项 1. A probe for scanned probe microscopy, comprising: a cantilever beam extending along a generally horizontal axis, the cantilever beam having a crystal facet surface at a chamfered end of the beam that is oriented at a tilt angle with respect to the generally horizontal axis, wherein the chamfered end of the beam has a vertical surface that runs orthogonal to the generally horizontal axis, such that a length of the vertical surface is less than a thickness of the cantilever beam, the vertical surface forming an obtuse angle with the crystal facet surface; and an epitaxial nanowire tip projecting outwardly from the crystal facet surface.
地址 Armonk NY US