发明名称 |
Scanned probe microscopy (SPM) probe having angled tip |
摘要 |
A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface. |
申请公布号 |
US8893310(B2) |
申请公布日期 |
2014.11.18 |
申请号 |
US201213539778 |
申请日期 |
2012.07.02 |
申请人 |
International Business Machines Corporation;Cornell University |
发明人 |
Reuter Mark C.;Bryce Brian A.;Ilic Bojan R.;Tiwari Sandip |
分类号 |
G01Q70/12;G01Q70/10;B82Y15/00 |
主分类号 |
G01Q70/12 |
代理机构 |
Cantor Colburn LLP |
代理人 |
Cantor Colburn LLP ;Alexanian Vazken |
主权项 |
1. A probe for scanned probe microscopy, comprising:
a cantilever beam extending along a generally horizontal axis, the cantilever beam having a crystal facet surface at a chamfered end of the beam that is oriented at a tilt angle with respect to the generally horizontal axis, wherein the chamfered end of the beam has a vertical surface that runs orthogonal to the generally horizontal axis, such that a length of the vertical surface is less than a thickness of the cantilever beam, the vertical surface forming an obtuse angle with the crystal facet surface; and an epitaxial nanowire tip projecting outwardly from the crystal facet surface. |
地址 |
Armonk NY US |