MICRO ELECTRO MECHANICAL SYSTEMS MAGNETIC FIELD SENSOR

摘要

The present disclosure provides a magnetic field sensor, for a magnetic field sensor sensing a magnetic field by current to be measured, which comprises: a substrate; a first driving electrode which has a path for flowing the reference current to be supplied from the substrate and which can move by the magnetic field of the current to be measured; and a second driving electrode which has a path for flowing the reference current to be supplied from the substrate and which can move by the magnetic field of the current to be measured, wherein the magnetic field sensor is configured to measure a change in capacitance in caused by the movement of the first driving electrode and the second driving electrode. Therefore, it is possible to improve a sensing function by detecting with two driving electrodes without a fixed electrode to maximize the mechanical displacement amount.