| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a scale which can be formed with a protection member without damaging the function of a phase grating.SOLUTION: A scale 100 includes: a phase grating 2; a cover glass 3; a groove 4; and an adhesion part 11. The phase grating 2 is formed in a phase grating formation region 21 on one surface of a substrate 1. The cover glass 3 is arranged on the phase grating 2. The adhesion part 11 is disposed in the outer periphery of the phase grating 2 on one surface of the substrate 1, and configured to adhere the substrate 1 and the cover glass 3. The groove 4 is configured to, when materials configuring the adhesion part 11 are applied, prevent the flow of the materials from the adhesion part 11 to the phase grating.</p> |
