| 发明名称 |
SYSTEM AND METHOD FOR MAINTAINING OPTICS IN FOCUS |
| 摘要 |
According to an embodiment of the invention there is provided a system that may include a pivot chuck that may include : a lower chuck portion; an upper chuck portion; a first distance changing module that may include a pivot mechanism and an angle changing element; wherein the pivot mechanism pivotally couples the lower chuck portion to the upper chuck portion; wherein the angle changing element is coupled between the upper and lower chuck portions; wherein the upper chuck portion may be arranged to support a substrate; wherein the angle changing element may be arranged to induce a rotation of the upper chuck portion in relation to the pivot mechanism in response to first focus correction signals. |
| 申请公布号 |
US2014327906(A1) |
申请公布日期 |
2014.11.06 |
| 申请号 |
US201414269156 |
申请日期 |
2014.05.04 |
| 申请人 |
CAMTEK LTD. |
发明人 |
Kafry Guy;Ben-Natan Arnon |
| 分类号 |
G01N21/13;G01N21/88 |
主分类号 |
G01N21/13 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A system, comprising:
a pivot chuck that comprises:
a lower chuck portion;an upper chuck portion;a first distance changing module that comprises a pivot mechanism and an angle changing element; wherein the pivot mechanism pivotally couples the lower chuck portion to the upper chuck portion; wherein the angle changing element is coupled between the upper and lower chuck portions;wherein the upper chuck portion is arranged to support a substrate;wherein the angle changing element is arranged to induce a rotation of the upper chuck portion in relation to the pivot mechanism in response to first focus correction signals. |
| 地址 |
Migdal Haemek IL |
