摘要 |
PROBLEM TO BE SOLVED: To provide a composite material extremely small in difference of a linear thermal expansion coefficient with that of aluminum nitride, and efficiently high in thermal conductivity, denseness and strength.SOLUTION: A dense composite material: contains top three large contents of silicon carbide, titanium silicon carbide and titanium carbide where this order is a descending one; contains the silicon carbide of 51 to 68 mass% and no titanium silicate; and has an open porosity of 1% or less. Characteristics of such the dense composite material are that, for example, an average linear thermal expansion coefficient at 40°C to 570°C is 5.4 to 6.0 ppm/K, a thermal conductivity is 100 W/(m K) or more and a four point flexural strength is 300 MPa or more. |