THERMAL TREATMENT SYSTEM AND METHOD OF PERFORMING THERMAL TREATMENT AND METHOD OF MANUFACTURING CIGS SOLAR CELL USING THE SAME

摘要

The present invention relates to a thermal treatment system, a method of performing thermal treatment, and a method of manufacturing a CIGS solar cell using the same. The thermal treatment system includes a reaction chamber having a reaction space; an external chamber which is separated with a preset distance from the reaction chamber and surrounds the reaction chamber; a heater module which includes a first heater module formed between the reaction chamber and the external chamber; a door chamber which opens/closes the reaction space of the reaction chamber; and an external cooling system which includes at least one external cooling device which is connected to a buffer space between the reaction chamber for cooling the outer wall of the reaction chamber and the external chamber. The external cooling device includes a circulation pipe which has one end and the other end which are connected to the buffer space, a heat exchanging device which is connected to the circulation pipe, and a circulation device which is connected to the circulation pope and circulates an inert gas. According to the present invention, an effective cooling process can be performed on the outer wall of the reaction chamber by constructing an external cooling system to make an inert gas tornado in the buffer space between the reaction chamber and the heater module and circulate it.