发明名称 METHOD FOR MANUFACTURING METAL-OXIDE THIN FILM USING LOW TEMPERATURE PROCESS, THIN FILM, AND ELECTRIC DEVICE THEREOF
摘要 Disclosed are a method for producing an oxide film using a low temperature process, an oxide film and an electronic device. The method for producing an oxide film according to an embodiment of the present invention includes the steps of coating a substrate with an oxide solution, and irradiating the oxide solution coat with ultraviolet rays under an inert gas atmosphere.
申请公布号 KR101456237(B1) 申请公布日期 2014.11.03
申请号 KR20120137532 申请日期 2012.11.30
申请人 发明人
分类号 H01L21/316 主分类号 H01L21/316
代理机构 代理人
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