METHOD FOR REMOVING DEFECT OF THIN FILM AND THE FLEXIBLE SUBSTRATE MANUFACTURED BY THE METHOD
摘要
A method for removing defect in a thin film and a flexible substrate manufactured thereby are provided. The method for removing defect in a thin film comprises forming a seed layer on a substrate; forming an inorganic thin layer on the seed layer; and removing defect generated in a process of forming the inorganic thin layer. Removing the defect is to remove by forming self-assembled monolayers.
申请公布号
KR101457157(B1)
申请公布日期
2014.10.31
申请号
KR20130164225
申请日期
2013.12.26
申请人
UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY