CONTROLLED VAPOR-PHASE DEPOSITION OF MULTILAYER COATING TO BE ADHERED THROUGH OXIDATION LAYER

摘要

PROBLEM TO BE SOLVED: To provide an improved method and an improved apparatus for vapor-phase deposition which form a multilayer film/coating on a substrate.SOLUTION: An improved vapor-phase deposition method is for depositing a multilayer coating and controls the thickness of an oxide layer coming in direct contact with a substrate 106 as a factor in correlation with the chemical composition of the substrate to secure good bonding of a layer to be deposited subsequently to the oxide layer. The improved method comprises depositing the oxide layer directly onto the substrate and then depositing an organic layer directly onto the oxide layer. Typically, the oxide layer and the organic layer are arranged alternately to form a series of layers.