MEMS Sensor Packaging and Method Thereof

摘要

A micro electro mechanical systems (MEMS sensor packaging includes a first wafer having a readout integrated circuit (ROIC) formed thereon., a second wafer disposed corresponding to the first wafer and having a concave portion on one side thereof and a MEMS sensor prepared on the concave portion, joint solders formed along a surrounding of the MEMS sensor and sealing the MEMS sensor jointing the first and second wafers, and pad solders formed to electrically connect the ROIC circuit of the first wafer and the MEMS sensor of the second wafer. According to the present disclosure, in joining and packaging a wafer having the ROIC formed thereon and a wafer having the MEMS sensor formed thereon, the size of a package can be reduced and an electric signal can be stably provided by forming internally pad solders for electrically connecting the ROIC and the MEMS sensor.

主权项

1. A micro electro mechanical systems (MEMS) sensor packaging comprising:
a first wafer having a readout integrated circuit (ROIC) formed thereon; a second wafer disposed corresponding to the first wafer and having a concave portion on one side thereof and a MEMS sensor prepared on the concave portion; joint solders formed along a surrounding of the MEMS sensor and sealing the MEMS sensor by jointing the first and second wafers; and pad solders formed on an inner side of the joint solder, to electrically connect the ROIC circuit of the first wafer and the MEMS sensor of the second wafer by connecting the first wafer and the second wafer, wherein the pad solders are of the same metal material as in the joint solder.