| 发明名称 |
APPARATUS AND METHOD FOR DETECTING POSITION ERROR OF EQUIPMENTS |
| 摘要 |
<p>An apparatus and a method to detect errors in positions of a device are disclosed. The position error detecting apparatus which detects errors in vertical positions of the device provided on the upper part of a substrate transferring unit comprises: a light emitting unit provided on one side of the space between the substrate transferring unit and the device; and a light receiving unit provided on other side of the space to face the light emitting unit.</p> |
| 申请公布号 |
KR20140119212(A) |
申请公布日期 |
2014.10.10 |
| 申请号 |
KR20130032238 |
申请日期 |
2013.03.26 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
KIM, HAK MIN |
| 分类号 |
H01L21/677;B65G49/06;G01B11/00;H01L21/68 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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