发明名称 DEPOSITION APPARATUS, METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS
摘要 The present invention relates to a deposition apparatus for depositing a deposition material on a substrate to improve deposition film characteristics. Provided are an organic light emitting display apparatus and a method for manufacturing the same, wherein the organic light emitting display apparatus comprises: a deposition source facing the substrate and emitting the deposition material; a patterning slit sheet which has a slit to deposit a desired pattern on the substrate and is disposed to face the substrate; a frame coupled with the patterning slit sheet; and a stage for supporting the frame and combined with the frame, in which a spaced area is formed between the frame and the stage.
申请公布号 KR20140118551(A) 申请公布日期 2014.10.08
申请号 KR20130034691 申请日期 2013.03.29
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 CHOI, WOON HYUN;KIM, KYUNG HAN;CHOI, MYONG HWAN;OH, KYOUNG WON
分类号 H01L51/56;C23C14/04 主分类号 H01L51/56
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