发明名称 |
DEPOSITION APPARATUS, METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS |
摘要 |
The present invention relates to a deposition apparatus for depositing a deposition material on a substrate to improve deposition film characteristics. Provided are an organic light emitting display apparatus and a method for manufacturing the same, wherein the organic light emitting display apparatus comprises: a deposition source facing the substrate and emitting the deposition material; a patterning slit sheet which has a slit to deposit a desired pattern on the substrate and is disposed to face the substrate; a frame coupled with the patterning slit sheet; and a stage for supporting the frame and combined with the frame, in which a spaced area is formed between the frame and the stage. |
申请公布号 |
KR20140118551(A) |
申请公布日期 |
2014.10.08 |
申请号 |
KR20130034691 |
申请日期 |
2013.03.29 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
CHOI, WOON HYUN;KIM, KYUNG HAN;CHOI, MYONG HWAN;OH, KYOUNG WON |
分类号 |
H01L51/56;C23C14/04 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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