METHOD FOR MANUFACTURING VIBRATOR, VIBRATOR, AND OSCILLATOR

摘要

PROBLEM TO BE SOLVED: To provide method for manufacturing an inexpensive and highly accurate vibrator.SOLUTION: A method for manufacturing a vibrator 100 includes the steps of: forming a first coating layer 40 covering a silicon substrate 10; patterning the first coating layer 40; forming a semiconductor layer 20 covering the silicon substrate 10 and the first coating layer 40; forming a beam-like vibration part 26 and a support part 21 supporting the vibration part 26 on the first coating layer 40 by patterning the semiconductor layer 20; forming an opening 44 through which the silicon substrate 10 is exposed; forming a hollow part 40 by removing the silicon substrate 10 through the opening 44; and removing the first coating layer 40. The step of forming the vibration part 26 and the support part 21 forms a support part 21 including a first portion 22 located on the silicon substrate 10 and a second portion 24 connecting the first portion 22 and the vibration part 26 and located on the first coating layer 40.