| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a handler and an inspection device which are capable of quickly and surely detecting whether a transport object remains in a socket or not with as small an amount of information as possible when detecting whether the transport object remains in the socket or not after performing a transport operation on the transport object placed on the socket.SOLUTION: A handler includes: a transport unit which transports an IC device 100 in an individual socket 61 for inspection, to another position; a light irradiation unit which irradiates the individual socket 61 for inspection with slit light beams 601 and 602 after the transport unit starts a transport operation; an imaging unit which captures an image of the individual socket 61 for inspection irradiated with the slit light beams 601 and 602 from the light irradiation unit; and a control unit which detects a difference between a position of the individual socket 61 for inspection in which the IC device 100 is not placed, and a position irradiated with the slit light beams 601 and 602 to determine whether the IC device 100 exists in the individual socket 61 for inspection or not.</p> |
