发明名称 APPARATUS FOR ALIGNING SUBSTRATE
摘要 <p>A substrate aligning apparatus is disclosed. The substrate aligning apparatus arranges substrates by moving an arranging unit in a straight-line motion, therefore, combining each horizontal support bar of the arranging unit to a vertical support bar, to be parallel. The assembling process and maintenance are very convenient.</p>
申请公布号 KR101445686(B1) 申请公布日期 2014.10.02
申请号 KR20120070505 申请日期 2012.06.29
申请人 发明人
分类号 G02F1/13;H01L21/68;H01L21/683;H01L31/18 主分类号 G02F1/13
代理机构 代理人
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