| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a water-saving type board cleaning system which can reduce the usage amount of cleaning water largely, while maintaining a high cleaning performance, even when system length is short.SOLUTION: A plurality of cleaning zones 20, 30, and 40 are arranged to the downstream side of a chemical processing zone 10. A cleaning mechanism 22 for paddle processing is prepared in the cleaning zone 20 on the uppermost upstream side. Cleaning mechanisms 31 and 32, and 41 and 42 for shower processing and tanks 60 and 70 which recover the used cleaning water are prepared in the cleaning zones 30 and 40 of the second and subsequent stages, respectively. Fresh cleaning water is supplied to the cleaning mechanisms 41 and 42 in the cleaning zone 40 in the lowermost downstream side. The used cleaning water is supplied to the cleaning zones in the upstream side subsequently with a cascade manner. The used cleaning water in the cleaning zone 20 on the uppermost upstream side is discard. Another cleaning mechanism 33 for paddle processing is prepared in the downstream side than the cleaning mechanism 31 for the shower processing in the second stage cleaning zone 30. The board speed which passes through under the cleaning mechanism 33 is made later than the board speed which passes through under the cleaning mechanism 22.</p> |
