SUBSTRATE PROCESSING APPARATUS

摘要

A substrate processing apparatus for processing a substrate comprises: a plurality of chuck pins each having an accommodating groove for accommodating a portion of peripheral part of the substrate, holding the substrate at a hold position in a horizontal posture by pressing inner faces of the accommodating grooves toward portions of peripheral part of the substrate; and a plurality of guide members, being disposed on or above the respective plurality of chuck pins, guiding process liquid discharged from the substrate to a surrounding area of the substrate; wherein each of the plurality of guide member includes: an inner-edge guide disposed at a position inward and above the accommodating groove; and an outer-edge guide disposed at a position level with or below the inner-edge guide and outward the chuck pin.

主权项

1. A substrate processing apparatus for processing a substrate comprising:
a plurality of chuck pins each having an accommodating groove for accommodating a portion of peripheral part of the substrate, holding the substrate at a hold position in a horizontal posture by pressing inner faces of the accommodating grooves toward portions of peripheral part of the substrate; a nozzle for ejecting process liquid toward the substrate held by the plurality of chuck pins; a plurality of guide members, being disposed on or above the respective plurality of chuck pins, guiding process liquid discharged from the substrate to a surrounding area of the substrate; a spin motor for rotating the plurality of chuck pins along with the plurality of guide members around a substrate rotation axis that vertically passes through the substrate; and a tubular cup, encircling the plurality of chuck pins and the guide members around the substrate rotation axis, receiving process liquid discharged outwardly from the substrate held by the plurality of chuck pins; wherein each of the plurality of guide member includes:
an inner-edge guide disposed at a position inward and above the accommodating groove; andan outer-edge guide disposed at a position level with or below the inner-edge guide and outward the chuck pin.