发明名称 |
Electron cyclotron resonance ion source device |
摘要 |
An electron cyclotron resonance ion source device includes a plasma chamber configured to contain a plasma; a high-frequency system configured to transmit a high-frequency wave into the chamber; a magnetic field generator configured to generate a magnetic field in the chamber; an accelerating tube including an isolating structure and an extraction system, the magnetic field generator for generating a magnetic field being entirely located downstream of the isolating structure. |
申请公布号 |
US8835871(B2) |
申请公布日期 |
2014.09.16 |
申请号 |
US201113994251 |
申请日期 |
2011.12.13 |
申请人 |
Commissariat a l'energie atomique et aux energies alternatives |
发明人 |
Delferriere Olivier;Tuske Olivier;Harrault Francis |
分类号 |
H01J27/16;H01J27/18;H01J37/32 |
主分类号 |
H01J27/16 |
代理机构 |
Pillsbury Winthrop Shaw Pittman LLP |
代理人 |
Pillsbury Winthrop Shaw Pittman LLP |
主权项 |
1. An electron cyclotron resonance ion source device comprising:
a plasma chamber configured to contain plasma; a magnetic field generator configured to generate a magnetic field in the plasma chamber, the plasma chamber being at a first potential, the magnetic field generator being at a second potential, a high-frequency system configured to propagate a high-frequency wave into the plasma chamber, an isolating structure including an upstream end that is at the first potential and a downstream end that is at the second potential, the magnetic field generator being arranged downstream from the isolating structure. |
地址 |
Paris FR |