发明名称 Electron cyclotron resonance ion source device
摘要 An electron cyclotron resonance ion source device includes a plasma chamber configured to contain a plasma; a high-frequency system configured to transmit a high-frequency wave into the chamber; a magnetic field generator configured to generate a magnetic field in the chamber; an accelerating tube including an isolating structure and an extraction system, the magnetic field generator for generating a magnetic field being entirely located downstream of the isolating structure.
申请公布号 US8835871(B2) 申请公布日期 2014.09.16
申请号 US201113994251 申请日期 2011.12.13
申请人 Commissariat a l'energie atomique et aux energies alternatives 发明人 Delferriere Olivier;Tuske Olivier;Harrault Francis
分类号 H01J27/16;H01J27/18;H01J37/32 主分类号 H01J27/16
代理机构 Pillsbury Winthrop Shaw Pittman LLP 代理人 Pillsbury Winthrop Shaw Pittman LLP
主权项 1. An electron cyclotron resonance ion source device comprising: a plasma chamber configured to contain plasma; a magnetic field generator configured to generate a magnetic field in the plasma chamber, the plasma chamber being at a first potential, the magnetic field generator being at a second potential, a high-frequency system configured to propagate a high-frequency wave into the plasma chamber, an isolating structure including an upstream end that is at the first potential and a downstream end that is at the second potential, the magnetic field generator being arranged downstream from the isolating structure.
地址 Paris FR