发明名称 SOLID-STATE IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a solid-state image sensor capable of improving light utilization efficiency, and a method of manufacturing the same.SOLUTION: The solid-state image sensor according to an embodiment includes: a plurality of photoelectric conversion parts provided on a substrate; color filters on the plurality of photoelectric conversion parts, each of which is provided for each of the plurality of photoelectric conversion parts; an insulating layer provided so as to surround the plurality of color filters; an antireflection layer provided between the plurality of photoelectric conversion parts and both the plurality of color filters and the insulating layer; and a protective layer provided between the insulating layer and the antireflection layer. The protective layer is formed of a material having an etching rate lower than that of silicon oxide.
申请公布号 JP2014165332(A) 申请公布日期 2014.09.08
申请号 JP20130034886 申请日期 2013.02.25
申请人 TOSHIBA CORP 发明人 FUKUMIZU HIROYUKI ; SHINREI NOBUTAKA
分类号 H01L27/14 主分类号 H01L27/14
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