METHOD FOR MANUFACTURING COLOR FILTER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter in which separation of a color filter is suppressed in a step of removing a resist pattern.SOLUTION: The method for manufacturing a color filter comprises: a cured film forming step in which a cured film that contains metal oxide particles having a primary particle diameter of 1 nm to 100 nm is formed on a supporting body; a colored layer forming step in which a colored layer is formed on the cured film; a photoresist layer forming step in which a photoresist layer is formed on the colored layer; a pattern forming step in which a resist pattern is formed on the colored layer by removing the photoresist layer into the form of a pattern; an etching step in which the colored layer is etched using the resist pattern as an etching mask by a dry etching process using an etching gas; and a resist pattern removing step in which the remaining resist pattern is removed after the etching step.