| 摘要 |
PROBLEM TO BE SOLVED: To provide a detection device and a detection method in which microstructures contained in gas or liquid can be detected or shapes of the microstructures can be evaluated with higher accuracy, and also to provide a detecting disk used for detection.SOLUTION: With markers as a reference over a plurality of tracks, detection signals are processed which are from markers formed by attaching microstructures onto the surface of a disk having a thin film layer on a substrate, scanning detection light thereon, and being aligned in the plurality of tracks over the radial direction of the disk, and the microstructures attached to the surface of the thin film layer, thereby detecting positions or shapes of the microstructures. |
