PIEZOELECTRIC ACTUATOR, MANIPULATOR, MANIPULATOR SYSTEM, AND METHOD FOR OPERATING MICRO-OBJECT

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that can obtain high responsiveness and prevent vibration except that in the axial direction of a drive shaft. ! SOLUTION: A piezoelectric actuator 44a is configured to finely drive a capillary to operate a micro-object by a piezoelectric element 92. The piezoelectric actuator includes: a pipette holding member 34 attached with the capillary and threaded circumferentially; a housing 48 having an inner circumferential surface coaxial with the pipette holding member 34; at least two roller bearings 80, 82 for rotatably supporting the pipette holding member 34 to the housing; the piezoelectric element disposed coaxially with the pipette holding member 34; a cover 88 fixed to the housing and axially fixing the piezoelectric element; and an inner ring spacer disposed between the inner rings of the two roller bearings. ! COPYRIGHT: (C)2014,JPO&INPIT