Apparatus for distributing processing gas having air leakage testing function

摘要

A process gas distributing device with gas leakage testing performance is disclosed. The present invention relates to the process gas distributing device which receives process gas from a gas supplier and distributes the gas to the process device and includes a body including a plurality of routes and a housing unit which covers a plurality of branch pipes distributing the process gas to the routes; a manifold which connects the branch pipes and the outside of the housing unit; a vacuum pump installed on an end portion of the manifold; an inner gas supply unit for testing gas for a leakage test; and a gas sensor which is connected to the vacuum pump and senses the gas for the leakage test.