| 摘要 |
PROBLEM TO BE SOLVED: To provide a management device of a semiconductor device for facilitating management of a semiconductor device by providing micro identification information to a semiconductor chip, or the like, and to provide a microscope. ! SOLUTION: In this invention, a management device of a semiconductor device includes an arithmetic unit accessible to a storage medium for storing the finger print pattern information in association with at least one of the semiconductor manufacturing conditions, measurement conditions when measuring the semiconductor, measurement results when measuring the semiconductor, and chip information. The arithmetic unit refers to at least one of the semiconductor manufacturing conditions, measurement conditions, measurement results, and chip information, based on the input of the finger print pattern information. This invention also provides a microscope. ! COPYRIGHT: (C)2014,JPO&INPIT |
