Exposure apparatus, exposure method, and method for producing device with electricity removal device by adding additive to liquid

摘要

A projection exposure apparatus transfers a pattern formed on a mask onto a substrate through a liquid. The projection exposure apparatus includes an optical member which projects an image of the pattern onto the substrate and an electricity removal device which removes electricity from the liquid to be supplied to a space between the optical member and a surface of the substrate by adding an additive to the liquid to suppress the liquid from being charged.

主权项

1. An exposure apparatus which transfers a pattern formed on a mask onto a substrate through an optical member and through a liquid of a liquid immersion area, the exposure apparatus comprising:
a movable member which is movable while the substrate is placed thereon; and a supply unit which has a supply port and a resin piping connected to the supply port, the supply unit supplying the liquid via the resin piping from the supply port onto a part of a surface of the substrate held by the movable member so as to form the liquid immersion area on the substrate, wherein
an additive that suppresses the liquid from being charged is added to the liquid so that the liquid, to which the additive has been added, is supplied onto the part of the surface of the substrate,the liquid is pure water, andthe liquid, to which the additive has been added, is supplied onto the part of the surface of the substrate via the supply port, and the substrate is exposed via the liquid to which the additive has been added.