REVERSING APPARATUS USING SUCTION

摘要

The present invention provides a reversing device using suction capable of vertically moving a suction plate with a very simple structure. The reversing device using suction for reversing a substrate (W) by sucking the substrate comprises a rotary shaft (15) supported by left and right side frames (14); a support member (16) horizontally attached to the rotary shaft (15) and rotating with the rotary shaft (15); the horizontal suction plate (18) held on the support member (16) through pressing members (17) to be vertically movable; and return springs (19) for elastically supporting upward the suction plate (18). The suction plate (18) moves downward by operating the pressing members (17). The suction plate (18) moves upward by the elastic support force of the return springs (19) to be returned to its original position by releasing the pressing force of the pressing members (17).