EVAPORATION SOURCE FOR TRANSPORTING CHEMICAL PRECURSORS, AND EVAPORATION METHOD FOR TRANSPORTING CHEMICAL PRECURSORS USING SAID SOURCE

摘要

The invention relates to an evaporation source for transporting chemical precursors to a substrate on which they are deposited by means of condensation, said source being formed by: a main tube (1) containing the precursors, and heating means (8). The upper part of the main tube (1) is provided with an inlet (5) and an outlet (6) for carrier gases, positioned opposite one another in the side surface (7) of the main tube (1) and aligned along a common line that extends transversely through the side surface (7) of the main tube (1). The invention also relates to an evaporation method for transporting chemical precursors, in which the carrier gases are introduced to and extracted from the main tubes (1) in an aligned manner and transversely to the side surface (7) of the tube.