发明名称 |
VACUUM STORAGE METHOD AND DEVICE FOR CRYSTALLINE MATERIAL |
摘要 |
<p>The present invention provides a method for storing a raw material inside a mold or a crucible, comprising the steps of: closing an opening of the mold filled with the raw material of a sintered metal or an opening of the crucible filled with the raw material for encouraging growth of a crystal for a semiconductor of a gallium arsenide crystal and a silicon single crystal or a polycrystalline silicon by a cap provided with a supply pipe and a vacuum evacuation pipe; vacuuming the inside the mold or crucible to a high vacuum state of 10- 4 torr or less via the vacuum evacuation pipe; drying by heating the raw material in the mold or crucible filled with a heated inert gas in the range of 50 C to 200 C via the supply pipe; and storing the raw material in the mold or the crucible covered with the cap.</p> |
申请公布号 |
EP2749676(A1) |
申请公布日期 |
2014.07.02 |
申请号 |
EP20110871102 |
申请日期 |
2011.08.25 |
申请人 |
MITSUBISHI MATERIALS TECHNO CORPORATION |
发明人 |
HORIOKA YUKICHI;KAJIWARA JIRO;SANADA HIROTSUGU |
分类号 |
C30B29/42;B22F1/00;C30B29/06 |
主分类号 |
C30B29/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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