| 摘要 |
PURPOSE: An injector module and a plasma reactor using the same are provided to form a uniform thin film and reduce the unnecessary consumption of process gas. CONSTITUTION: An injector module comprises an injector body, gas injection channels (30,40), gas exhaust channels (50), and at least one trench portion (70). The injector body is installed in a plasma reaction chamber. The gas injection channel is formed in the injector body so that the inside or outside of the plasma reaction chamber is connected and sprays process gas to the inside of the plasma reaction chamber. The gas exhaust channel is formed in the injector body so that the inside or outside of the plasma reaction chamber is connected and exhausts the process gas to the outside of the plasma reaction chamber. The trench portion is formed by depressing the internal surface of at least one of the injector body and the plasma reaction chamber in the opposite side of the gas exhaust channel across the gas injection channel. The trench portion prevents the process gas sprayed through the gas injection channel from flowing in the opposite side of the gas exhaust channel. |
