FABRICATION OF THREE DIMENSIONAL NANO STRUCTURED METAL OXIDES USING PROXIMITY-FIELD NANOPATTERNING AND ALD

摘要

The present invention relates to a three-dimensional nanostructure metal oxide manufacturing method comprising: (a) a step of spin-coating a substrate with a photoresist; (b) a step of forming pores of a periodic three-dimensional porous nanostructured pattern on the photoresist through a proximity-field nanopatterning method; (c) a step of inducing a metal oxide into the three-dimensional porous pores by using the photoresist, as a template, wherein the periodic three-dimensional porous nanostructured pattern is formed by an atomic layer deposition using a metal precursor; and (d) a step of obtaining a three-dimensional nanostructured porous metal oxide of an inverse form of the three-dimensional porous nanostructure formed on the photoresist by removing the photoresist template, and to a metal oxide manufactured thereby.