Field controlled diode with positively biased gate

摘要

An integrated circuit containing a field controlled diode which includes a p-type channel region between an upper gate and a lower n-type depletion gate, a p-type anode in a p-type anode well abutting the channel region, and an n-type cathode in a p-type anode well abutting the channel region opposite from the anode well. An n-type lower gate link connects the lower gate to the surface of the substrate. A surface control element is located at the surface of the channel region between the cathode and the upper gate. A process of forming the integrated circuit containing the field controlled diode is described.

主权项

1. A process of forming an integrated circuit, comprising:
providing a monolithic p-type semiconductor substrate; and forming a first field controlled diode, by a process including the steps:
forming an n-type lower depletion gate in said substrate under a channel region located in said substrate;forming an n-type well ion implant mask over a top surface of said substrate so as to expose said substrate in an area to be implanted in an area defined for said field controlled diode;performing an n-type well ion implant operation on said integrated circuit so as to implant n-type dopants through said exposed area of said n-type well ion implant mask into said substrate to form a lower gate link implanted layer in said field controlled diode area over a portion of said lower depletion gate;forming a p-type well ion implant mask over said top surface of said substrate so as to expose said substrate in an area to be implanted in an area defined for said field controlled diode;performing a p-type well ion implant operation on said integrated circuit so as to implant p-type dopants through said exposed area of said p-type well ion implant mask into said substrate to form an anode well implanted layer in said field controlled diode area abutting said channel region and over a portion of said lower depletion gate, and to form a cathode well implanted layer in said field controlled diode area abutting said channel region opposite from said anode well implanted layer and over a portion of said lower depletion gate;performing a well anneal operation on said integrated circuit which heats said substrate so that at least a portion of said n-type dopants implanted into said substrate during said n-type well ion implant operation and at least a portion of said p-type dopants implanted into said substrate during said p-type well ion implant operation to become electrically activated, so that:
said n-type dopants in said lower gate link implanted layer form a lower gate link in said substrate contacting an upper surface of said lower depletion gate;said p-type dopants in said anode well implanted layer form an anode well in said substrate contacting said upper surface of said lower depletion gate; andsaid p-type dopants in said cathode well implanted layer form an cathode well in said substrate contacting said upper surface of said lower depletion gate;forming an upper gate at said top surface of said substrate over said channel region adjacent to said anode well;forming a surface control element at said top surface of said substrate over said channel region between said upper gate and said cathode well;forming an n-channel source/drain (NSD) ion implant mask over a top surface of said substrate so as to expose said substrate in an area to be implanted in an area defined for said field controlled diode;performing an NSD ion implant operation on said integrated circuit so as to implant n-type dopants through said exposed area of said NSD ion implant mask into said substrate to form a cathode implanted layer in said field controlled diode area in said cathode well;forming a p-channel source/drain (PSD) ion implant mask over said top surface of said substrate so as to expose said substrate in an area to be implanted in an area defined for said field controlled diode;performing a PSD ion implant operation on said integrated circuit so as to implant p-type dopants through said exposed area of said PSD ion implant mask into said substrate to form an anode implanted layer in said field controlled diode area in said anode well; andperforming a source/drain anneal operation on said integrated circuit which heats said substrate so that at least a portion of said n-type dopants implanted into said substrate during said NSD ion implant operation and at least a portion of said p-type dopants implanted into said substrate during said PSD ion implant operation to become electrically activated, so that:
said n-type dopants in said cathode implanted layer form cathode in said substrate in said cathode well; andsaid p-type dopants in said anode implanted layer form an anode in said substrate in said anode well.