SEMICONDUCTOR DEVICE HAVING METALLIC RESISTOR STRUCTURE
摘要
Disclosed is a semiconductor device comprising an activation area and a field area on a substrate; a gate structure on the activation area and a resistance structure on the field area; a first interlayer insulation layer for covering the gate structure and the resistance structure; a resistance trench plug for coming in contact with the resistance structure by vertically passing through the first interlayer insulation layer; a second interlayer insulation layer on the first interlayer insulation layer and the resistance trench plug; and a resistance contact plug for vertically passing through the first and second interlayer insulation layers to come in contact with the resistance structure.
申请公布号
KR20140077044(A)
申请公布日期
2014.06.23
申请号
KR20120145747
申请日期
2012.12.13
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
XIONG JUNJIE;KIM, YOON HAE;KANG, HONG SEONG;LEE, YOON SEOK;CHOI, YOU SHIN