SUBSTRATE PROCESSING DEVICE, APPLICATION METHOD FOR SUBSTRATE DEVICE AND STORAGE MEDIUM

摘要

A substrate processing device comprises: a loading port into which a carrying container is conveyed; a detection unit for detecting a storage state of a substrate in the carrying container conveyed into the loading port and having the cover removed therefrom; a processing unit for processing the substrate picked up from the carrying container conveyed into the loading port; and a control unit. The control unit executes: a first step of detecting the storage state of the substrate in the carrying container before the substrate is taken away from the carrying container conveyed into the loading port and forwarded to the processing unit; a second step of detecting the storage state of the substrate in the carrying container before the cover is closed and after the substrate processed by the processing unit is put back into the original carrying container; and a third step of determining whether or not the carrying container is abnormal on the basis of the first step and the second step.