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发明名称
摘要
申请公布号	JP5521184(B2)	申请公布日期	2014.06.11
申请号	JP20120006963	申请日期	2012.01.17
申请人		发明人
分类号	C23C4/04;B32B9/00;C23C4/08;C23C4/18;H01L21/3065	主分类号	C23C4/04
代理机构		代理人
主权项
地址

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