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发明名称
光罩基底及转印用遮罩之制造方法
摘要
申请公布号
TWI440966
申请公布日期
2014.06.11
申请号
TW099109992
申请日期
2010.03.31
申请人
ＨＯＹＡ股份有限公司 日本
发明人
桥本雅广;岩下浩之
分类号
G03F1/32
主分类号
G03F1/32
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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