发明名称 |
APPARATUS AND METHOD FOR MANUFACTURING SAME |
摘要 |
This apparatus is composed of an insulating film having a high dielectric constant and an electrode film including a metal material, layered in that order on a substrate divided into an active region and an element separation region surrounding the active region, and has a gate structure extending from the active region to the element separation region. The element separation region is provided with: a groove formed in the substrate; a first insulating film covering the side wall face of the groove and embedded in the bottom part of the groove; and a second insulating film covering the first insulating film embedded in the bottom part of the groove and embedded in the top part of the groove. |
申请公布号 |
WO2014084132(A1) |
申请公布日期 |
2014.06.05 |
申请号 |
WO2013JP81483 |
申请日期 |
2013.11.22 |
申请人 |
PS4 LUXCO S.A.R.L.;YOSHIDA, MIKA |
发明人 |
YOSHIDA, MIKA |
分类号 |
H01L21/336;H01L21/76;H01L21/8238;H01L21/8242;H01L27/08;H01L27/092;H01L27/108;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|