发明名称 |
HEATER ASSEMBLY FOR DISK PROCESSING SYSTEM |
摘要 |
<p>A heater assembly for a disk processing system including a heater element configured to heat a substrate carried by a holder, and a heater cover having an aperture to expose the heater element to the substrate. The cover may be metal to thermally couple the heater to a cooling plate. The cover may have an outer surface having a thermal barrier surrounding the aperture to thermally insulate the holder.</p> |
申请公布号 |
WO2014085508(A1) |
申请公布日期 |
2014.06.05 |
申请号 |
WO2013US72103 |
申请日期 |
2013.11.26 |
申请人 |
WD MEDIA, LLC |
发明人 |
GREGORY, LANDDELL;ZAINUDDIN, ZATUL 'ITRI B.;LIM, CHI CHOY |
分类号 |
G11B33/14 |
主分类号 |
G11B33/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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