Electron microscope

摘要

A scanning electron microscope suppresses a beam drift by reducing charging on a sample surface while suppressing resolution degradation upon observation of an insulator sample. An electron microscope includes an electron source and an objective lens that focuses an electron beam emitted from the electron source, which provides an image using a secondary signal generated from the sample irradiated with the electron beam. A magnetic body with a continuous structure and an inside diameter larger than an inside diameter of an upper pole piece that forms the objective lens is provided between the objective lens and the sample.

主权项

1. An electron microscope that provides an image using a secondary signal generated from a sample irradiated with an electron beam, the electron microscope comprising:
an electron source; an objective lens that focuses the electron beam emitted from the electron source; a magnetic body provided between the objective lens and the sample; and a non-magnetic body provided between the objective lens and the sample; wherein: the magnetic body has a continuous structure and an inside diameter larger than an inside diameter of an upper pole piece that forms the objective lens, the non-magnetic body has a continuous structure and an inside diameter smaller than the inside diameter of the upper pole piece that forms the objective lens, the non-magnetic body has a trench that stores the magnetic body, the magnetic body is disposed in the trench, and the magnetic body is disposed at a position closer to the objective lens than the non-magnetic body.