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发明名称
Verfahren zum elektrolytischen AEtzen einer Halbleiteranordnung mit einem Halbleiterkoerper aus im wesentlichen einkristallinem Halbleitermaterial
摘要
申请公布号
DE1104617(B)
申请公布日期
1961.04.13
申请号
DE1959S063496
申请日期
1959.06.18
申请人
SIEMENS-SCHUCKERTWERKE AKTIENGESELLSCHAFT
发明人
PATALONG DR.-ING. HUBERT;HOFFENREICH FRITZ
分类号
C25F3/12;H01L21/3063
主分类号
C25F3/12
代理机构
代理人
主权项
地址
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