发明名称
摘要 A method for producing a compound semiconductor composed of pentanary kesterite/stannite of the type Cu2ZnSn(S,Se)4 is described. The method has the following steps: producing at least one precursor layer stack consisting of a first precursor layer and a second precursor layer; thermally treating the at least one precursor layer stack in a process chamber; and feeding at least one process gas into the process chamber during the thermal treatment of the at least one precursor layer stack. Furthermore, a thin-film solar cell with an absorber consisting of the pentanary compound semiconductor Cu2ZnSn(S,Se)4 on a body is described.
申请公布号 JP2014513413(A) 申请公布日期 2014.05.29
申请号 JP20130557035 申请日期 2012.02.22
申请人 发明人
分类号 H01L21/20;C01B19/00;H01L21/36;H01L31/06 主分类号 H01L21/20
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