| 摘要 |
The present invention discloses a gas assisted imprint system and the manufacturing method thereof. More specifically, instead of utilizing a rigid platform to, the gas assisted imprint system and the manufacturing method of the present invention utilizes a film to support the work-piece so as to evenly apply a force to the surface by the deformation caused by pressurized gas. More specifically, one of the main features of the present invention is that the present invention utilizes two films to cover the surfaces of a work-piece and applies a force evenly thereto by deforming the films by high pressure fluid. Accordingly, the present invention is capable of pressing the irregular surface of the work-piece evenly, solving the long lasted problem of the prior art. |
