发明名称 |
HOLDING DEVICE FOR HOLDING A PATTERNED WAFER |
摘要 |
This invention relates to a mounting apparatus for mounting and supporting one structure side of a substrate, which structure side has structures thereon. The apparatus having a mounting element with a flat mounting surface for supporting the structures and a suction surface F2 which penetrates the mounting surface solely in an outer ring surface for effecting a fluid flow which produces suctions on the substrate. |
申请公布号 |
EP2729962(A1) |
申请公布日期 |
2014.05.14 |
申请号 |
EP20110743548 |
申请日期 |
2011.08.12 |
申请人 |
EV GROUP E. THALLNER GMBH |
发明人 |
THALLNER, WERNER;BURGSTALLER, DANIEL |
分类号 |
H01L21/683;H01L21/687 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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