| 摘要 |
The present invention relates to a SF_6 gas decomposition method including a microwave processing step and, more particularly, to a processing at a frequency of 2,400 to 2,450 MHz and a maximum output of 1.0 to 1.2 kW. In the decomposition method described above, Al_2O_3 is a catalyst, and SiC is a heating element. Accordingly, the SiC is used as s microwave heating element and Al_2O_3 is used as the catalyst, and thus SF_6 can be decomposed at 600 to 900°C, which is a temperature lower than the temperature of the conventional art, and energy can be used efficiently. In a case where plasma of the conventional art is used, conversion into a perfluorinated compound of another type may follow, thereby lowering the decomposition efficiency and generating toxic materials such as CoF_2 and HF decaying a pump. In contrast, the present invention, which uses microwaves, is advantageous in that such toxic materials are not generated. |
