DEVICE AND METHOD FOR MEASURING DYNAMIC CHARACTERISTIC OF AIR BEARING

摘要

Disclosed are a device and a method for accurately measuring the dynamic characteristics of an air bearing. According to an embodiment of the present invention, the device measures the dynamic characteristics between a main shaft and an air bearing for supporting the load of the main shaft, by supplying air pressure to the main shaft, and comprises: a sine wave signal generator which supplies a signal in a sine wave shape to a main shaft; a fast Fourier transform (FFT) processor which conducts Fourier transform on the displacement and load measured with regard to the main shaft; and a dynamic characteristic generator which substitutes the measured displacement and load values to a formula for the supplied excitation signal and the corresponding displacement signal in order to calculate a coefficient, and substitutes the results measured by the sine wave signal generator on multiple amplitude and frequencies to the equation of motion in order to calculate a dynamic characteristic coefficient.