| 摘要 |
Provided are a probe card-securing device, a probe inspection device, a probe inspection method, and a probe card, in which fluctuations in the distal end position of the probe needle caused by thermal expansion of the probe card and the card holder can be minimized. A probe card-securing device for securing a probe card (10) to a prober, the probe card-securing device comprising: a connection ring (30) for securing to the prober casing; a card holder (20) for holding the external peripheral part of the probe card (10) between the connection ring (30) and the card holder (20); and a PCLS (50) for securing the center part of the probe card (10) and the connection ring (30). |
