| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a plasma generating apparatus capable of stably lighting plasma for a long time.SOLUTION: A plasma generating apparatus comprises a waveguide block 30 including a waveguide function and a plasma generating nozzle function, and connected to a downstream end of a normal waveguide 20. The waveguide block 30 includes a rectangle second waveguide space 30A, and has a lower side wall 311, an upper side wall 312, a left side wall 313 and a right side wall 314, each of which defines the second waveguide space 30A. The lower side wall 311 is a thick side wall, and the lower side wall 311 is equipped with a plasma generating nozzle part 40. The plasma generating nozzle part 40 includes an outside electrode surface 41 and an inside electrode 42, and a holding member for holding the inside electrode 42 with an electrical insulation property is secured with respect to the outside electrode surface 41. The holding member includes a holding cylinder 43, and a box nut 44. The inside electrode 42 can be replaced by removing the waveguide block 30 from the waveguide 20 and removing the box nut 44.</p> |
